Stepper Equipment Ultratech wafer stepper parts 1100 1500 1700 2700 4700 titan saturn

Documentation

Reticles

SEI Diagnostic Test Reticle (SDTR)

Test reticle is compatible with all internal run mode #8 diagnostic tests for model 990 thru 1700 steppers

Use to create a VTR wafer to visually detect focus and printing defects. Also used to create frosty wafers

Use to create a VTR wafer to visually detect focus and printing defects. Has clear field to use for Gamma tests

Use to visually measure blindstep accuracy using a microscope, or thru automated metrology tools.

Stepper Specifications

The following documents contain operational and facilities specifications for the designated model stepper. These specifications were derived from the maintenance manual for each model. Please check with the OEM for the most current published specifications.

Model 990 -1000 wfl	Model 1100
Model 1100/4035	Model 1500
Model 1600 DSA - Nanotech 160	Model 1700
Model 2244i	Model 4700 - Titan

Miscellaneous

HP362 Hard Disk Backup Utility

Utility to back up unprotected files on the internal hard disk inthe HP362 computer to 3.5" floppy diskettes.

Frequently Asked Questions about the operation, installation, and benefits of the Intelligent Autoloader.

Operations manual for the Intelligent Autoloader upgrade for Smart and Automation autoloaders.

Operations manual for the Stepnet stepper network upgrade for systems with HP9826 computers.

Installation and operations guide for the Digital camera system for model 990 thru 1700 steppers.