Theta Stage
0526-700001	400 step theta drive assy baseplate
1056-690700	Chuck spacer
0606-002001	Chuck spacer and adapter for large hole chucks
0606-000003	Chuck, 3 inch
0606-100003	Chuck, 3 inch, Oblong Megafrosty, aluminum
0606-100003-ss	Chuck, 3 inch, Oblong Megafrosty, stainless steel
01-05-00186	Chuck, 4 inch round aluminum
0606-100004	Chuck, 4 inch, Oblong Megafrosty, aluminum
0606-100004-ss	Chuck, 4 inch, Oblong Megafrosty, stainless steel
0606-000004-dsa	Chuck, 4 inch, round DSA Chuck
01-06-00072	Chuck, 5 inch round aluminum
01-06-00072-ss	Chuck, 5 inch round stainless steel
0606-100005	Chuck, 5 inch, Oblong Megafrosty, aluminum
0606-100005-ss	Chuck, 5 inch, Oblong Megafrosty, stainless steel
01-05-00189	Chuck, 6 inch round aluminum
01-05-00189-ss	Chuck, 6 inch round stainless steel, .6" hole spacing
01-05-00189-ssl	Chuck, 6 inch round stainless steel, 1" hole spacing
0606-100006-amx	Chuck, 6 inch, Oblong Megafrosty, aluminum
0606-100006	Chuck, 6 inch, Oblong Megafrosty, aluminum
0606-100006-amx	Chuck, 6 inch, Oblong Megafrosty, aluminum, custom
0606-100006-ss	Chuck, 6 inch, Oblong Megafrosty, stainless steel
0606-100016	Chuck, 6 inch, Oblong, aluminum, small fibre hole
0606-000008	Chuck, 8 inch
0606-100008	Chuck, 8 inch, Oblong Megafrosty, aluminum
1025-588500	Detent Plate
0556-652600	Extended theta bearing with post
0454-323486	Flagpole Inverter Upgrade Kit
1006-454802	Flagpole Theta Stage Lower spider refurbishment
bs-0000n1	Leniar ball slide for theta drive assby
5107-000016	Limit switch for theta stage drive
23-08-04665	low vac regulator
1006-450402	Pedestal, Theta stage
1006-450402-s	Pedestal, Theta stage, for both square and round chucks
ph264m-01a	PMT / WAS 400 step stepper motor
wtc-pedestal	Replacement pedestal with spacers for various thickness wafers
0454-323485	Rolling Diaphram Upgrade Kit
0505-364300	short theta bearing with post
0506-245100	Stepper motor assy, 200 step
0504-428674	Theta bearing spring assb
01-08-00762	Theta Home Switch Assembly
se-000040	Theta home switch connector
01-08-0061603	Theta link pin
01-08-001	Theta link pin
2522-110204	Theta Motor Coupling , model 1000 400 step mtr
2522-110205-sei	Theta Motor Coupling , model 1100, 1500, 1700 for SEI 200 step geared drive
2522-110205	Theta Motor Coupling , model 1100, 1500, 1700, OEM theta drive
1006-249001	Theta Stage 200 step lead screw
0526-700331	Theta Stage 400 step drive assembly
1006-249000	Theta Stage 400 step lead screw
1056-656700	Theta Stage 400 step Split Nut
0556-687300	Theta Stage 400 step stepper motor
52-02-00170	Theta Stage Diaphrams, Rolling
10-08-04743	Theta Stage Flexture for Flagpole Inverter
0526-700332	Theta stage leadscrew bearing
1006-454801	Theta Stage Lower spider refurbishment
1006-859785	Theta Stage Lower Spider Refurbishment for steppers with electronic focus systems
01-05-95247	Theta stage replacable insert
01-05-98745	Theta Stage replacible insert modification
0556-691500	Theta stage ribbon cable A for model 1100 steppers J205
0556-691600	Theta stage ribbon cable B for model 1100 steppers J206
0556-691560	Theta stage umbilical cabel A/B with flexible tubing
0516-460900	Theta stage umbilical cable for model 990 / 1000WF steppers
1015-532600	Theta Stage V-Bearing
0556-700854	Theta stepper motor 200 step geared drive assembly
01-15-04766-06	Wafer chuck assembly, 6"