Eprom, 27c64

P/N  27c64
Description  Eprom, 27c64
Notes  This chip is designed for 6" smart autoloaders with the single belt drive on input slot. It is for the input side only. Contains the "nudge" routine to center wafer under sensors at gate.
Models  900 1000 1100 1500 1700
Availability  New
 

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