Model 1000, Sn 255
 
info@stepequipment.com
 
This stepper is capable of resolving 1.25 micron lines and spaces in a production environment, and 1.0 um lines and spaces in an R&D environment. It was manufactured in May of 1984. It has been stored in a temperature controlled area since de-installation by Stepper Equipment. Stepper Equipment can configure this system for substrates sizes 2", 3", 4", 5", or 6", with automation, intelligent,  or manual loader. It can also be configured for round wafers with major flats. It is fully operational to manufacturer's specificatons, and is available for examination and testing at Stepper Equipment by prospective buyers.
 
Configuration
Optics
Wafer Size
 2", 3", 4", 5", 6", or 8"
Resolution
  1.25 micron
Loader type
 Automation, Intelligent
Max square
  14.1mm x 14.1mm *
Computer
 HP 362 with internal hard disk
Max aspect rect
  30mm x 9.5mm*
Lamp power supply
 HA500-B
Max area rect
 * 27.5mm x 10.6mm
Crossmasks
 140um
Adjustable NA
 N/A
       
Options
Software
Reticle cooler
  no
Software rev
 A.4.1 Rev D
Theta rmv inserts
 No
Focus gage
 n/a
Chuck
 Round or oblong
Air gage
 n/a
   
 
 
 
 
Refurbishment Status
  
XY motors Refurbished Depth of focus Pass. See results
Drive rods Refurbished Uniformity test 1.2% ( see results )
Mercury arc lamp New Repetitive defect Pass. See results
Elliptical reflector New Overlay results Pass. See results
UV cutoff filter Replaced Reticle positioning test Pass. See results
Blast shield n/a Tuneup test Pass. See results
Cable dressing and repair Completed Stage signature test Pass. See results
Top and side panels No top panel, All side panels Blind stepping accuracy Pass. See results
Xy mirrors Excellent Stepper test Pass. See results
       
       
 
Pictures
  
 
( click on any picture below for larger version )